Meterial | BC ( Boron carbide ceramics ) |
---|---|
Purity | >99.9% |
Density (g/cm3) | 2.52 g/㎠ |
Flexural Strength (Mpa) | >400~650 Mpa |
Hardness (kg/mm2) | >3500 |
Resistivity (Ohm·㎝) | <0.5 |
coefficient of expansion (x10-6/℃) | 4.5 |
Product Name | Ring |
SHOWER HEAD |
---|---|---|
Meterial | BC ( Boron carbide ceramics ) |
|
Purity(%) | > 99.9 % |
|
Applications | Dry etcher process |
|
Out Dia | 360mm |
|
Thickness (Flatness) | 20mm |
|
Res. ( Ω.㎝ ) | Diameter 0.3~0.7mm |
|
Roundness < 0.05mm |
||
Concentricity < 0.05mm |
||
Δ XY-Position < 0.05mm |
||
Surface Condition | Grinding |
|
Quality ( Visual ) | Chipping |
|
Scratch |
||
Crack |
||
Stain Free |
||
Quality ( Cleaning Process ) | 100 ppb or less per element (Na, Mg, Al, K, Ca, Cr, Fe, Ni, Cu, Zn, and Y) |