비쥬얼
Products
Products
Al2o3
Specification
| Product Name | RING , PLATE |
|
|---|---|---|
| Meterial | AL203 |
|
| Purity ( % ) | 99.8% |
|
| Applications | Dry etcher process |
|
CVD Process |
||
ALD Process |
||
| Out Diameter Size (mm) | 700mm ( max ) |
|
| Thickness (Flatness) | 20mm ( max ) |
|
| Density (g/㎤) | 383 |
|
| Flexural strength (Mpa) | 317 |
|
| Vickers hardness (HV 0.5) | 1662 |
|
| Modulus of Elasticity (Gpa) | 383 |
|
| Compression Strength (Mpa) | 999 |
|